@prefix nllsh: <http://dati.lnb.lv/onto/subject/> .
@prefix skos: <http://www.w3.org/2004/02/skos/core#> .
@prefix dc: <http://purl.org/dc/terms/> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

nllsh:LNC10-000342835
  skos:altLabel "Litogrāfija, elektronu staru"@lv, "Elektronu stara litogrāfija"@lv, "Lithography, Electron beam"@en, "Elektronová litografie"@cs, "Litogrāfija, elektronu kūļa"@lv, "Electron beam lithography"@en, "EKL (elektronu kūļa litogrāfija)"@lv, "Elektronu staru litogrāfija"@lv ;
  skos:closeMatch <https://aleph.nkp.cz/F/?func=direct&doc_number=000760839&local_base=AUT>, <https://enciklopedija.lv/skirklis/201236-elektronu-k%C5%AB%C4%BCa-litogr%C4%81fija>, <https://www.wikidata.org/entity/Q256845>, <http://id.loc.gov/authorities/subjects/sh85077608>, <http://id.worldcat.org/fast/1000292> ;
  skos:broader nllsh:LNC10-000066072, nllsh:LNC10-000165410 ;
  dc:modified "2024-06-18"^^xsd:date ;
  dc:created "2024-01-02"^^xsd:date ;
  skos:note "Source: Latvijas Universitātes Cietvielu institūts - 2024.01.02." ;
  skos:narrower nllsh:LNC10-000348865 ;
  skos:prefLabel "Elektronu kūļa litogrāfija"@lv, "EBL (electron beam lithography)"@en ;
  skos:inScheme nllsh: ;
  a skos:Concept ;
  dc:identifier "LNC10-000342835" .

nllsh:LNC10-000348865
  skos:prefLabel "Selektīva apstarošana ar elektronu staru"@lv, "Selective patterning"@en ;
  a skos:Concept ;
  skos:broader nllsh:LNC10-000342835 .

nllsh:LNC10-000066072
  skos:prefLabel "Mikroelektronika"@lv, "Microelectronics"@en ;
  a skos:Concept ;
  skos:narrower nllsh:LNC10-000342835 .

nllsh:LNC10-000165410
  skos:prefLabel "Fotolitogrāfija"@lv, "Photolithography"@en ;
  a skos:Concept ;
  skos:narrower nllsh:LNC10-000342835 .