Concept information
There is no term for this concept in this language.
Preferred term
Elektronu kūļa litogrāfija (lv)
Broader concept
- Fotolitogrāfija (lv)
- Mikroelektronika (lv)
Narrower concepts
Entry terms
- EBL (electron beam lithography)
- Electron beam lithography
- Lithography, Electron beam
Note
- Source: Latvijas Universitātes Cietvielu institūts - 2024.01.02.
Identifier
- LNC10-000342835
In other languages
-
Elektronová litografie
Czech
-
Latvian
-
EKL (elektronu kūļa litogrāfija)
-
Elektronu stara litogrāfija
-
Elektronu staru litogrāfija
-
Litogrāfija, elektronu kūļa
-
Litogrāfija, elektronu staru
URI
http://dati.lnb.lv/onto/subject/LNC10-000342835
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