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... > Science > Natural history > Physical sciences > Electronics > Microelectronics > EBL (electron beam lithography)
... > Science > Exact science > Technology > High technology > Microtechnology > Microelectronics > EBL (electron beam lithography)
Solids > Crystals > Semiconductor > Microelectronics > EBL (electron beam lithography)
Electronics--Materials > Semiconductor > Microelectronics > EBL (electron beam lithography)
... > Science > Humanities > Art forms > Art > Graphic arts > Print making > Lithography > Photolithography > EBL (electron beam lithography)

Preferred term

EBL (electron beam lithography)  

Narrower concepts

Entry terms

  • Electron beam lithography
  • Lithography, Electron beam

Note

  • Source: Latvijas Universitātes Cietvielu institūts - 2024.01.02.

Identifier

  • LNC10-000342835

In other languages

  • Elektronová litografie

    Czech

  • Latvian

  • EKL (elektronu kūļa litogrāfija)
  • Elektronu stara litogrāfija
  • Elektronu staru litogrāfija
  • Litogrāfija, elektronu kūļa
  • Litogrāfija, elektronu staru

URI

http://dati.lnb.lv/onto/subject/LNC10-000342835

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